Advanced Spectral Technology has developed advanced solutions for VCSEL manufacturers that provide significant capability advantages at wafer, die, and film frame level. This includes optimized high-performance solutions for defect detection & review, metrology, and classification. Advanced IR Imaging capability including NIR (Near-wave infrared) and SWIR (short-wave infrared). These fully-integrated systems address both development and production requirements. These system solutions are highly flexible and can be configured with advanced automated part (wafer, die, film frame) handling options. These systems are also capable of being tuned to achieve the highest level of image quality and performance specific to the characteristics and properties of the VCSEL material and design.
Optical Aperture Metrology
AST’s advanced VCSEL metrology capability precisely measures and reports the “Optical Aperture” (OA) diameter, roundness and angle of the feature if it is elongated (oval) relative to the primary wafer global fiducial reference frame. These state-of-the-art turnkey metrology systems provide the required accuracy and stability to perform these critical VCSEL measurements using advanced IR imaging technology.
Imaging can be performed at NIR (visible to 1050nm) through SWIR (900nm – 1700nm) enabling measurements to be taken at the optimum wavelength that provides the best image quality for executing critical VCSEL measurements including CD-Overlay. AST’s ScopeViewer software provides the capability to create a program (script) that can automatically perform the required metrology functions.
VCSEL Metrology Products
Advanced Metrology System
The AST-300 integrates best-in-class precision positioning capability within a highly flexible system that provides an optimum platform for integrating AST’s advanced imaging systems. These systems provide high-performance and precision to capture high-resolution image of the VCSEL aperture along with performing other critical measurements using AST’s advanced ScopeViewer metrology software suite.
AST can also integrate other sensor technology such as Spectrophotometers, Ellipsometers, Profilometers, etc. to combine multiple tool metrology tasks into a single system, reducing operation and tool counts and handling requirements.
Data can be output through SECS GEM or other factory information systems enabling report generation, process control, and other factory, process, and product metrics to be tracked.
Optional integrated wafer handler with pre-align and OCR provides the capability to add automated load / unload of wafers / tape frames from a cassette.