Advanced Spectral Technology has developed advanced solutions for VCSEL manufacturers that provide significant capability advantages at wafer, die, and film frame level. This includes optimized high-performance solutions for defect detection & review, metrology, and classification. Advanced IR Imaging capability including NIR (Near-wave infrared) and SWIR (short-wave infrared). These fully-integrated systems address both development and production requirements. These system solutions are highly flexible and can be configured with advanced automated part (wafer, die, film frame) handling options. These systems are also capable of being tuned to achieve the highest level of image quality and performance specific to the characteristics and properties of the VCSEL material and design.