Probe Card Metrology

AST’s advanced automated system solutions address a broad range of manufacturing processes and applications from component and sub-assembly level to fully integrated probe card assemblies 300mm (& larger) in size.  These solutions start with AST’s extensive imaging expertise combined with advanced automated positioning technology that delivers state-of-the art inspection & metrology performance and capability.  

Our high-performance Probe Card Inspection Systems provide the capability to capture a high-resolution image of the entire probe card from low magnification (2.5X objective) to high magnification (100X obj).  AST’s advanced image capture technology offers superior performance resulting in significantly shorter cycle-times to capture and process the entire wafer including the ability to capture and stitch images at different image planes (Z-heights).  These systems provide the capability to perform inspection / defect detection or can be performed on an AST off-line review station(s) that can be positioned outside of the cleanroom.

Given the many different individual fabrication processes (i.e., etching, coatings, assembly) involved in producing a finished Probe Card, there are many process specific requirements that involve different approaches and techniques for inspection, measurement, and test.  AST has the experience and ability to work collaboratively to address these requirements and provide targeted solutions in those critical areas where process control is paramount to quality & performance of the Probe Card.