Probe Card Metrology

AST’s advanced automated system solutions address a broad range of manufacturing processes and applications from component and sub-assembly level to fully integrated probe card assemblies 300mm (& larger) in size.  These solutions start with AST’s extensive imaging expertise combined with advanced automated positioning technology that delivers state-of-the art inspection & metrology performance and capability.  

Our high-performance Probe Card Inspection Systems provide the capability to capture a high-resolution image of the entire probe card from low magnification (2.5X objective) to high magnification (100X obj).  AST’s advanced image capture technology offers superior performance resulting in significantly shorter cycle-times to capture and process the entire wafer including the ability to capture and stitch images at different image planes (Z-heights).  These systems provide the capability to perform inspection / defect detection or can be performed on an AST off-line review station(s) that can be positioned outside of the cleanroom.

Given the many different individual fabrication processes (i.e., etching, coatings, assembly) involved in producing a finished Probe Card, there are many process specific requirements that involve different approaches and techniques for inspection, measurement, and test.  AST has the experience and ability to work collaboratively to address these requirements and provide targeted solutions in those critical areas where process control is paramount to quality & performance of the Probe Card.


Probe Card Measurement Solutions

AST’s advanced Metrology system platforms address both field of view (FOV) measurement capability as well as point-to-point precision measurement applications.  Standard configurations for Bright Field, Dark Field, UV, NIR, and SWIR are available as are semi-custom optics readily available for your requirement as needed (DIC, Polarized, etc.).   Objective magnifications range from 1X to 150X and can be integrated on a single objective mount, or software controlled linear lens changer, or a 5 or 6 position motorized turret.  Computer controlled coaxial, ring light, oblique, and backlight illumination options are available.  

System configurations include fully-automated turnkey solutions, integrated metrology workstations, and tabletop units.  AST’s powerful ScopeViewer metrology software suite provides maximum functionality and ability to create specific measurement scripts for executing automated measurement sequences.  


Advanced Metrology System


The AST-300 integrates best-in-class precision positioning capability within a highly flexible system that provides an optimum platform for integrating AST’s advanced imaging systems.   These systems provide the required performance and precision to capture high-resolution images that can be utilized to perform critical measurements using AST’s advanced ScopeViewer metrology software suite.  


Data can be outputted through SECS GEM or other factory information systems enabling report generation, process control, and other factory, process, and product quality metrics to be tracked.

Probe Card Metrology Applications

Defect Detection & Review

High-Performance automated inspection solutions for detecting coating defects, shorts, damage or missing probes

Metrology / Inspection

Advanced measurement solutions addressing multiple process control and quality metrics in the manufacturing of probe cards

Assembly, Integration, & Test

AST approaches these opportunities by understanding the customer’s requirements in developing and deploying the best optimized solution