AST-IR Automated
Automated NIR/SWIR Metrology & Inspection System
The AST-IR delivers breakthrough subsurface inspection capabilities for silicon and other wafer materials. This automated system penetrates through silicon to reveal hidden defects and alignment issues in bonded dies, wafers, and MEMS devices. By leveraging advanced NIR and SWIR imaging technology, the system provides critical insights for 3D stacking, wafer bonding, and failure analysis applications.
Product Highlights
Our Automated NIR/SWIR Metrology & Inspection System combines high-resolution imaging with programmable automation to address complex inspection challenges. The system features recipe-selectable optical filters and digital contrast enhancement tools to maximize visibility of subsurface features across different material types.
- Automated, high-resolution optical system with magnification options from 5X to 100X
- Flexible wafer handling supporting 50mm to 300mm wafers with various cassette options
- Programmable illumination with recipe-controlled wavelength selection and filter wheels
- Advanced camera options: NIR (4M to 25M pixel) and SWIR (640x512 or 1280x1024 InGaAs)
- ScopeViewer3 software with advanced vision tools for pattern finding and geometric measurements
- Comprehensive factory integration with SECS-GEM interface and recipe generation in Python
Applications
- Pre & post bonded die inspection for die-to-die layer alignment in 3D stacking
- Wafer-to-wafer layer alignment verification for 3D stacking
- Die-to-wafer bonding alignment
- Internal inspection and metrology on MEMS devices
- Semiconductor failure analysis
- Subsurface inspection using NIR (up to 1100nm) for low-doped material and SWIR (900-1650nm) for highly doped wafers
Full Specifications
- Inspection of Sub Surface on Si and other wafer materials
- Optical Contrast Enhancement: Recipe Selectable Band-Pass, Long-Pass Filters
- Digital Contrast Enhancement: Recipe Control of Contrast w/ Histogram
- Advanced Infrared Imaging Technology:
- Standard: Visible Though NIR (400-1050nm)
- Optional: SWIR (900nm-1700nm) Standard & Optional High-Resolution Options
- Automated & Programmable Illumination, Wavelength Selection, Aperture Diaphragm, and Camera Exposure / Gain ensures best Image Contrast
- Advanced Vision Tool Library for Executing Pattern Find, and Geometric Measurements
- 300+mm x 300+mm w/ 100mm Z-axis Travel
- ISO 5 (Class 100) Cleanroom Compatible
- ISO 4 (Class 10) Cleanroom Option
- Semi S2 / S8 Protocol Compliant
- Light Tower for System Status
- Automated, High-Resolution Optical System
- 5X, 10X, 20X, 50X, & 100X BF IR Objectives
- Optional BF/DF Objectives for NIR
- Can mix NIR & BF/DF Obj. on Turret
- Broadband or LED Light Source
- Standard Video Auto-Focus
- Optional Tracking Laser Auto-Focus
- System can be configured with or without wafer loader
- Standard: Supports 50mm to 200mm wafers Open Cassette
- Optional: SMIF, FOUP, 300mm Wafers, Film Frame, Etc
Contact Sales
Our metrology systems can be fully customized to meet your requirements. If you have questions about our product offerings or capabilities, please contact us for more information.