Uses: Inspection, Metrology
Uses: Inspection, Metrology

AST-S200T

Short Wave Infrared Microscope

The AST-S200T Short Wave Infrared Microscope is used for sub-surface observation, imaging, verification and inspection of materials. Transparent to the Near Infrared (NIR) / Shortwave Infrared (SWIR) wavelengths.

An infrared microscope is ideal when non-destructive inspection of vital components is a critical requirement. Our infrared microscopes are built to exacting specifications, and offer a wide range of capabilities.

Download PDF Specification Sheet >> Download PDF for ast-s200t.pdf

OPTICAL SPECIFICATIONS

Camera:

  • Cooled InGaAs (900-1700nm)
  • Silicon-based option for NIR applications, (740nm-1100nm)

Illumination:

  • Epi, optimized Koehler
  • Transmitted, optimized sub-stage

Filters:

  • Multi position filter slider sets available based on application

Aperture/Field Diaphragms:

  • Manual adjust

Magnification:

  • 10x-1000x

Objectives:

  • 1x-100x, (1x, 2.5x, 5x, 10x, 20x, 50x, 100x). Greater than 100x objectives are available based on the application

Turret:

  • Manual, optional motorized

Resolution:

  • Submicron optical and digital

Display:

  • Large monitor for live and stored image display

PLATFORM SPECIFICATIONS

Stand:

  • 8” Microscope stand with coarse/fine Z focus control

Stage:

  • 8” x 8” Stage with coarse/fine manual position control. Other stage sizes available upon request.
  • Optional motorized stage with joystick control available

 

PROCESS

In Process:

  • Verification of critical alignment applications such as: MEMS, wafer bonding, 3D chip stacking, crack/chip inspection metrology.

Post Process:

  • Verification, validation, inspection and measurement of critical sub-surface features

Failure Analysis:

  • Process development tool verification, part characterization, qualification and environmental testing.