Uses: Inspection, Metrology
Uses: Inspection, Metrology


Advanced Inspection & Metrology System with Wafer Handling

This top performance system is designed for applications where high-speed defect detection and precision measurements on wafers and other parts are required. It is well suited for use as a dedicated production tool or as a versatile process development system. It features a powerful set of automated as well as semi-automatic optical/video tools optimized for high accuracy, production throughput, and ease of use.

This automated and versatile platform can be configured with specialized optical paths across the spectrum utilizing precise part staging. The system offers significant and unique advantages for dual production/engineering use, and provides the perfect solution when both defect detection and dimensional metrology are required.

The system can be configured or customized to meet your exact requirements with a variety of optical and illumination accessories, custom wafer/part fixtures, as well as custom operator interface, data formats and reports.

Download PDF Specification Sheet >> Download PDF for ast-200h.pdf


  • Wafer level defect detection & measurement
  • Precision MEMS and HD component inspection
  • Advanced microelectronics package inspection


  • Designed for automatic/semi-automatic operation
  • Extensive defect detection features & capability
  • Integrated dimensional metrology features


  • Sub-micron precision optical measurements
  • High accuracy staging with 0.02 μm linear encoder resolution


  • Up to 10 field of views per second - application dependent.
  • 200mm/second part staging speed


  • Very easy to use, program and set up
  • Highly visual data with rich color graphics & video


  • Specialized optics and other advanced options
  • Optional wafer and other part types handling
  • Customizable for application specific solutions