AST’s advanced Metrology system platforms address both field of view (FOV) measurement capability as well as point-to-point precision measurement applications. Standard configurations for Bright Field, Dark Field, UV, NIR, and SWIR are available as are semi-custom optics readily available for your requirement as needed (DIC, Polarized, etc.). Objective magnifications range from 1X to 150X and can be integrated on a single objective mount, or software controlled linear lens changer, or a 5 or 6 position motorized turret. Computer controlled coaxial, ring light, oblique, and backlight illumination options are available.
System configurations include fully-automated turnkey solutions, integrated metrology workstations, and tabletop units. AST’s powerful ScopeViewer metrology software suite provides maximum functionality and ability to create specific measurement scripts for executing automated measurement sequences.
Advanced Metrology System
The AST-300 integrates best-in-class precision positioning capability within a highly flexible system that provides an optimum platform for integrating AST’s advanced imaging systems. These systems provide the required performance and precision to capture high-resolution images that can be utilized to perform critical measurements using AST’s advanced ScopeViewer metrology software suite.
Data can be outputted through SECS GEM or other factory information systems enabling report generation, process control, and other factory, process, and product quality metrics to be tracked.
All of our systems can be fully customized to meet your requirements. If you have questions about our product offerings or capabilities, please contact us for more information.