VCSEL Manufacturing Solutions

Advanced Spectral Technology has developed advanced solutions for VCSEL manufacturers that provide significant capability advantages at wafer, die, and film frame level.  This includes optimized high-performance solutions for defect detection & review, metrology, and classification.  Advanced IR Imaging capability including NIR (Near-wave infrared) and SWIR (short-wave infrared). These fully-integrated systems address both development and production requirements.  These system solutions are highly flexible and can be configured with advanced automated part (wafer, die, film frame) handling options.  These systems are also capable of being tuned to achieve the highest level of image quality and performance specific to the characteristics and properties of the VCSEL material and design.

Applications

Metrology

Ability to accurately and repeatedly measure critical VCSEL features including OA (Optical Aperture) & CD-Overlay (Critical Dimension)

Defect Detection & Review

Advanced automated inspection solutions providing high-speed image capture and defect detection capability

Wafer, Die & Film Frame

AST provides system solutions at die to wafer level (up to 300mm) including thinned wafers on carriers

Assembly & Integration

Solutions that are designed to meet specific manufacturing / process requirements

Process Control

AST approaches these opportunities by understanding the customer’s process control requirements and establish the best optimized solution

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