INSPECTION & METROLOGY
Advanced Defect Inspection & Metrology System with Wafer Handling
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Metrology Inspection System
Highly Flexible Angle Measurement System
Short Wave Infrared Microscope
Mid Wave Infrared for Defect Detection and Analysis
Small Format Standard and Right Angle Viewing Microscope
Atmospheric Plasma for Surface Preparation
Products >> uScope
Small Format Standard and
Right Angle Viewing Microscope
The uScope is a Desktop Microscope System with integrated coaxial White LED (Brightfield) illumination, motorized focus stage with 50mm travel, variable speed mouse driver, and manual XY stage. Includes power supplies for illuminator and motorized focus stage.
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• Auxiliary Lenses
• Calibration Standards
• Rotary Fixture
• Right Angle Mounting Fixture
• Right Angle Viewing Attachment
• Mitutoyo, Seiwa Objectives
• Optics: Infinity design, 200mm focal length. Compatible with Mitutoyo objectives.
• Lighting: Co-axial lighting standard. Quad Ring and Dark Field illumination optional.
• Video Camera: Standard C-Mount for use with all digital and analog cameras.
• Display: Monitor or computer.
• Drive Method: Joystick control. Stepper motor with sub micron positioning. Optional remote controller.
Features & Specs